Mode-synthesizing atomic force microscopy for 3D reconstruction of embedded low-density dielectric nanostructures
Crossref DOI link: https://doi.org/10.1007/s12274-015-0728-8
Published Online: 2015-05-27
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Vitry, Pauline
Bourillot, Eric
Plassard, Cédric
Lacroute, Yvon
Calkins, Eric
Tetard, Laurene
Lesniewska, Eric
Text and Data Mining valid from 2015-05-27