High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2
Crossref DOI link: https://doi.org/10.1007/s12274-015-0789-8
Published Online: 2015-07-24
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cartamil-Bueno, Santiago J.
Steeneken, Peter G.
Tichelaar, Frans D.
Navarro-Moratalla, Efren
Venstra, Warner J.
van Leeuwen, Ronald
Coronado, Eugenio
van der Zant, Herre S. J.
Steele, Gary A.
Castellanos-Gomez, Andres
Text and Data Mining valid from 2015-07-24