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High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography

Crossref DOI link: https://doi.org/10.1007/s12274-022-4149-1

Published Online: 2022-02-28

Published Print: 2022-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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