A passive reaction force compensation (RFC) mechanism for a linear motor motion stage
Crossref DOI link: https://doi.org/10.1007/s12541-014-0402-1
Published Online: 2014-05-02
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
You, Yo-han
Ahn, Hyeong-Joon
Text and Data Mining valid from 2014-05-01
