Analysis of the capacitive pressure sensor with ring mesa structure
Crossref DOI link: https://doi.org/10.1007/s12541-014-0431-9
Published Online: 2014-06-05
Published Print: 2014-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kwon, Soon-Kwan
Cho, Hee-Chan
Yi, Seung-Hwan
Text and Data Mining valid from 2014-06-01