Motion error estimation of slide table on the consideration of guide parallelism and pad deflection
Crossref DOI link: https://doi.org/10.1007/s12541-014-0548-x
Published Online: 2014-09-07
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Gyu Ha
Han, Jun An
Lee, Sun-Kyu
Text and Data Mining valid from 2014-09-01
