Design of a laser autocollimator-based optical sensor with a rangefinder for error correction of precision slide guideways
Crossref DOI link: https://doi.org/10.1007/s12541-015-0058-5
Published Online: 2015-03-12
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tan, Siew Leng
Shimizu, Yuki
Meguro, Takayuki
Ito, So
Gao, Wei
Text and Data Mining valid from 2015-03-01