Analysis of removal mechanism on oxide CMP using mixed abrasive slurry
Crossref DOI link: https://doi.org/10.1007/s12541-015-0081-6
Published Online: 2015-03-12
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Hojun
Jeong, Haedo
Text and Data Mining valid from 2015-03-01