Analysis of pressure distribution and verification of pressure signal by changes load and velocity in chemical mechanical polishing
Crossref DOI link: https://doi.org/10.1007/s12541-015-0137-7
Published Online: 2015-06-09
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Changsuk
Park, Jaehong
Kinoshita, Masaharu
Jeong, Haedo
Text and Data Mining valid from 2015-06-01