Precise contour motion of XY stage driven by ultrasonic linear motors in a high vacuum environment
Crossref DOI link: https://doi.org/10.1007/s12541-016-0037-5
Published Online: 2016-03-05
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Dong-Jin
Lee, Sun-Kyu
Kim, Wan-Soo
Text and Data Mining valid from 2016-03-01