Mechanical aspects of the chemical mechanical polishing process: A review
Crossref DOI link: https://doi.org/10.1007/s12541-016-0066-0
Published Online: 2016-04-16
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Hyunseop
Lee, Dasol
Jeong, Haedo
Text and Data Mining valid from 2016-04-01