Semi-active reaction force compensation for a linear motor motion stage
Crossref DOI link: https://doi.org/10.1007/s12541-016-0104-y
Published Online: 2016-07-10
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nguyen, Duc Canh
Ahn, Hyeong-Joon
License valid from 2016-07-01