Controlled airbrush coating of polymer resists in Roll-to-Roll nanoimprinting with regimented residual layer thickness
Crossref DOI link: https://doi.org/10.1007/s12541-016-0115-8
Published Online: 2016-07-10
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Koo, Sungkwan
Lee, Sung Ho
Kim, Jeong Dae
Hong, Jung Goo
Baac, Hyoung Won
Kwak, Moon Kyu
Ok, Jong G.
License valid from 2016-07-01