3D multi-layered film thickness profile measurements based on photometric type imaging ellipsometry
Crossref DOI link: https://doi.org/10.1007/s12541-016-0120-y
Published Online: 2016-08-02
Published Print: 2016-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Seo, Yong Bum
Yun, Young Ho
Joo, Ki-Nam
License valid from 2016-08-01