Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology
Crossref DOI link: https://doi.org/10.1007/s12541-016-0133-6
Published Online: 2016-09-10
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Meiyun
Takahashi, Satoru
Takamasu, Kiyoshi
License valid from 2016-09-01