Design and evaluation of micro-cutting tools for local planarization
Crossref DOI link: https://doi.org/10.1007/s12541-016-0151-4
Published Online: 2016-10-12
Published Print: 2016-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bilegt, Erkhes
Yoon, Hae-Sung
Lee, Hyun-Taek
Kim, Eun-Seob
Kim, Chung-Soo
Ahn, Sung-Hoon
License valid from 2016-10-01