Research on the design of the ultra-high-precision positioning control error compensation
Crossref DOI link: https://doi.org/10.1007/s12541-016-0160-3
Published Online: 2016-10-12
Published Print: 2016-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Park, Dae-Kwang
Lee, Gyung-Il
Gao, Jia-Chen
Kim, Jae-Yeol
License valid from 2016-10-01