Ultra-precision 3 DOF tilting stage for workpiece setup of scalable micro-pattern machining
Crossref DOI link: https://doi.org/10.1007/s12541-017-0129-x
Published Online: 2017-08-08
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Jong-Su
Youn, Hongseok
Kang, Bongchul
License valid from 2017-08-01