Effect of mixing ratio of non-spherical particles in colloidal silica slurry on oxide CMP
Crossref DOI link: https://doi.org/10.1007/s12541-017-0158-5
Published Online: 2017-10-08
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Hojun
Lee, Dasol
Kim, Moonsung
Jeong, Haedo
License valid from 2017-10-01
