Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage
Crossref DOI link: https://doi.org/10.1007/s12541-018-0013-3
Published Online: 2018-01-10
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Xiaozhi
Xu, Qingsong
License valid from 2018-01-01