Fast and Reliable Measurement of Thin Film Thickness Profile Based on Wavelet Transform in Spectrally Resolved White-Light Interferometry
Crossref DOI link: https://doi.org/10.1007/s12541-018-0024-0
Published Online: 2018-02-11
Published Print: 2018-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Min-Gab
Pahk, Heui-Jae
Text and Data Mining valid from 2018-02-01
Article History
Received: 30 May 2017
Revised: 31 August 2017
Accepted: 26 September 2017
First Online: 11 February 2018