LASIE: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures
Crossref DOI link: https://doi.org/10.1007/s12541-018-0133-9
Published Online: 2018-08-14
Published Print: 2018-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Dae Hee
Yun, Young Ho
Joo, Ki-Nam http://orcid.org/0000-0001-9484-2644
Text and Data Mining valid from 2018-08-01
Article History
Received: 3 January 2018
Revised: 24 April 2018
Accepted: 26 April 2018
First Online: 14 August 2018