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Analysis of Parameters Affecting the Surface Roughness in Sapphire Wafer Polishing Using Nanocrystalline–Microcrystalline Multilayer Diamond CVD Pellets

Crossref DOI link: https://doi.org/10.1007/s12541-019-00057-5

Published Online: 2019-02-22

Published Print: 2019-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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