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Shape Memory Alloy-Based Microscale Bending Actuator Fabricated by a Focused Ion Beam Chemical Vapor Deposition (FIB-CVD) Gap-Filling Process

Crossref DOI link: https://doi.org/10.1007/s12541-019-00250-6

Published Online: 2019-10-25

Published Print: 2020-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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