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On-Machine Self-calibration of a Two-Dimensional Stage Using an Absolute X–Y–Θ Position Sensor

Published Online: 2020-06-03

Published Print: 2020-09

Authors

Kim, Jong-Ahn https://orcid.org/0000-0001-5114-4272
Kim, Jae Wan

Kang, Chu-Shik

Lee, Jae Yong
Funding

Funding for this research was provided by:

Korea Research Institute of Standards and Science (GP2019-0005-01)
License Information

Text and Data Mining valid from 2020-06-03

Version of Record valid from 2020-06-03
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Article History

Received: 11 October 2019

Revised: 19 May 2020

Accepted: 21 May 2020

First Online: 3 June 2020

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