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Fabrication Methods for Microscale 3D Structures on Silicon Carbide

Published Online: 2022-10-12

Published Print: 2022-12

Authors

Cho, Younghak

Hwang, Jihong

Park, Min-Soo

Kim, Bo Hyun https://orcid.org/0000-0002-1546-5420
Funding

Funding for this research was provided by:

Ministry of Trade, Industry and Energy (20010984)
License Information

Text and Data Mining valid from 2022-10-12

Version of Record valid from 2022-10-12
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Article History

Received: 20 April 2022

Revised: 11 July 2022

Accepted: 5 September 2022

First Online: 12 October 2022

Document is current