A Study of Ultrafast Ablation on ITO Thin Films with Wavelengths of 513 and 1026 nm for High Resolution Patterning
Crossref DOI link: https://doi.org/10.1007/s12541-023-00868-7
Published Online: 2023-08-14
Published Print: 2023-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Choi, Junha
Cho, Sung-Hak http://orcid.org/0000-0002-4191-1631
Text and Data Mining valid from 2023-08-14
Version of Record valid from 2023-08-14
Article History
Received: 16 May 2023
Revised: 28 July 2023
Accepted: 28 July 2023
First Online: 14 August 2023