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Temperature Control for High Removal Rate and Low Dishing in TGV CMP

Published Online: 2024-08-13

Published Print: 2024-09

Authors

Shin, Yeongil

Jeong, Seunghun

Jeong, Haedo https://orcid.org/0000-0003-0520-2376
Funding

Funding for this research was provided by:

National Research Foundation of Korea grant funded (2021R1A2C1095017)
License Information

Text and Data Mining valid from 2024-08-13

Version of Record valid from 2024-08-13
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Article History

Received: 14 May 2024

Revised: 29 July 2024

Accepted: 29 July 2024

First Online: 13 August 2024

Document is current