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Signal Transformed Internal Model Control for Non-raster Scanning of Piezo-actuated Nanopositioning Stages

Crossref DOI link: https://doi.org/10.1007/s12555-019-0064-y

Published Online: 2020-02-04

Published Print: 2020-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ling, Jie

Feng, Zhao

Ming, Min

Guo, Zhao

Xiao, Xiaohui https://orcid.org/0000-0002-8212-2452
License Information

Text and Data Mining valid from 2020-02-04

Version of Record valid from 2020-02-04
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Article History

Received: 26 January 2019

Revised: 12 October 2019

Accepted: 18 November 2019

First Online: 4 February 2020