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Dynamic Model Identification for Adaptive Polishing System

Crossref DOI link: https://doi.org/10.1007/s12555-021-0205-y

Published Online: 2022-08-17

Published Print: 2022-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

An, Hao https://orcid.org/0000-0002-4974-1876
Zhang, Sining

Cui, Chaoran

Qian, Cheng

Lin, Weiyang https://orcid.org/0000-0002-0493-1289
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Text and Data Mining valid from 2022-08-17

Version of Record valid from 2022-08-17
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Article History

Received: 16 March 2021

Revised: 3 August 2021

Accepted: 29 October 2021

First Online: 17 August 2022