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Influence of photoresist layer on unetched guided mode resonance filter

Crossref DOI link: https://doi.org/10.1007/s12596-015-0294-1

Published Online: 2015-10-31

Published Print: 2016-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Jianyu

Wang, Qi

Li, Ye

Chen, Peng

Huang, Tian

Dai, Bo

Huang, Yuanshen

Zhang, Dawei
Funding

Funding for this research was provided by:

National Science Instrument Important Project (2012YQ17000407)

National Natural Science Foundation (61205156, 61378060)

Innovation program of Shanghai Municipal Education Commission (14YZ095)
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