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Reusable microfluidic chip processed by femtosecond double-pulse-assisted polarization-selective etching in fused silica glass

Published Online: 2022-06-03

Published Print: 2023-03

Authors

Chu, Dongkai https://orcid.org/0000-0001-9970-5315
Li, Weizhen

Qu, Shuoshuo

Dong, Xinran

Yao, Peng
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52075302)

National Natural Science Foundation of China (51875321)

Natural Science Foundation of Shandong Province (ZR2021QE247)

The Open Research Fund of State Key Laboratory of High Performance Complex Manufacturing (Kfkt2020-09)

The Key Laboratory of High-efficiency and Clean Mechanical Manufacture at Shandong University, Ministry of Education
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Text and Data Mining valid from 2022-06-03

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Article History

Received: 24 January 2022

Accepted: 6 April 2022

First Online: 3 June 2022

Document is current