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Reusable microfluidic chip processed by femtosecond double-pulse-assisted polarization-selective etching in fused silica glass

Published Online: 2022-06-03

Published Print: 2023-03

Authors

Chu, Dongkai https://orcid.org/0000-0001-9970-5315
Li, Weizhen

Qu, Shuoshuo

Dong, Xinran

Yao, Peng
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52075302, 51875321)

Natural Science Foundation of Shandong Province (ZR2021QE247)

The Open Research Fund of State Key Laboratory of High Performance Complex Manufacturing (Kfkt2020-09)

The Key Laboratory of High-efficiency and Clean Mechanical Manufacture at Shandong University, Ministry of Education
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Text and Data Mining valid from 2022-06-03

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Article History

Received: 24 January 2022

Accepted: 6 April 2022

First Online: 3 June 2022

Document is current