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Coherent artifact-free optical profilometry with improved space bandwidth product using partially spatially coherent light

Crossref DOI link: https://doi.org/10.1007/s12596-024-02283-1

Published Online: 2024-10-27

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Kaur, Harpreet

Bhatt, Sunil

Tayal, Shilpa

Tiwari, Shubham

Mehta, Dalip Singh https://orcid.org/0000-0002-1569-1647
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Text and Data Mining valid from 2024-10-27

Version of Record valid from 2024-10-27
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Article History

Received: 28 May 2024

Accepted: 27 September 2024

First Online: 27 October 2024