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Optimizing the design and performance of capacitive accelerometers: a comprehensive simulation and manufacturing approach

Crossref DOI link: https://doi.org/10.1007/s12597-025-01064-z

Published Online: 2025-12-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ghemari, Zine

Belkhiri, Salah
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Text and Data Mining valid from 2025-12-05

Version of Record valid from 2025-12-05
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Article History

Received: 28 December 2024

Accepted: 17 November 2025

First Online: 5 December 2025

Declarations

:

: Not applicable.