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Highly precise Ti/Pt/Cr/Au thin‐film temperature sensor embedded in a microfluidic device

Crossref DOI link: https://doi.org/10.1007/s12598-019-01301-7

Published Online: 2019-08-26

Published Print: 2021-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Jie‐Jun

Wang, Tao https://orcid.org/0000-0001-8453-535X
Wu, Chuan‐Gui

Luo, Wen‐Bo

Shuai, Yao

Zhang, Wang‐Li
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51602039)

CETC Joint Fund (6141B08100203)

Central University Support Project (ZYGX2016J051)

Central University Support Project (ZYGX2016J050)
License Information

Version of Record valid from 2019-08-26

Text and Data Mining valid from 2019-08-26

Text and Data Mining valid from 2019-08-26

Version of Record valid from 2019-08-26
More Information

Article History

Received: 13 March 2018

Revised: 2 July 2018

Accepted: 5 June 2019

First Online: 26 August 2019