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Correlation between pass‐through flux of cobalt target and microstructure and magnetic properties of sputtered thin films

Crossref DOI link: https://doi.org/10.1007/s12598-020-01500-7

Published Online: 2020-08-04

Published Print: 2021-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Xu, Xiu‐Lan

Huang, Qian‐Ming

Feng, Guo‐Nan

Han, Gang

Guo, Qi‐Xun

Xiong, Xiao‐Dong

He, Xin

Luo, Jun‐Feng

Wang, Rong‐Ming

Feng, Chun https://orcid.org/0000-0002-1940-3091
Yu, Guang‐Hua https://orcid.org/0000-0002-0753-633X
Funding

Funding for this research was provided by:

the National Key R&D Program of China (Grant No. 2017YFB0305502-01)

National Key Research and Development Program of China (Grant No. 2017YFB0305502‐01)
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Text and Data Mining valid from 2020-08-04

Text and Data Mining valid from 2020-08-04

Version of Record valid from 2020-08-04
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Article History

Received: 31 July 2019

Revised: 25 September 2019

Accepted: 19 June 2020

First Online: 4 August 2020