A facile and non‐destructive quartz fiber shadow mask process for the sub‐micrometer device fabrication on two‐dimensional semiconductors
Crossref DOI link: https://doi.org/10.1007/s12598-021-01787-0
Published Online: 2021-07-17
Published Print: 2022-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Li‐An
Zhao, Fang‐Yuan
Zhai, Shen‐Qiang https://orcid.org/0000-0003-3186-4461
Liu, Feng‐Qi
Wei, Zhong‐Ming
Version of Record valid from 2021-07-17
Text and Data Mining valid from 2021-07-17
Article History
Received: 1 February 2021
Revised: 1 April 2021
Accepted: 9 April 2021
First Online: 17 July 2021