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Production of HfO2 thin films using different methods: chemical bath deposition, SILAR and sol-gel process

Crossref DOI link: https://doi.org/10.1007/s12613-014-0978-6

Published Online: 2014-08-05

Published Print: 2014-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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