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Impact of Hydrogen Passivation on Electrical Properties of Polysilicon Thin Films

Crossref DOI link: https://doi.org/10.1007/s12633-017-9746-3

Published Online: 2018-05-07

Published Print: 2018-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zaidi, B.

Hadjoudja, B.

Chouial, B.

Kamli, K.

Chibani, A.

Shekhar, C.
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Text and Data Mining valid from 2018-05-07
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Article History

Received: 22 September 2017

Accepted: 22 December 2017

First Online: 7 May 2018