Statistical Modeling and Surface Texture Study of Polished Silicon Wafer Si (100) using Chemically Assisted Double Disk Magnetic Abrasive Finishing
Crossref DOI link: https://doi.org/10.1007/s12633-018-9961-6
Published Online: 2018-08-11
Published Print: 2019-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pandey, Kheelraj http://orcid.org/0000-0001-5536-4328
Pandey, Utkarsh
Pandey, Pulak M.
Text and Data Mining valid from 2018-08-11
Article History
Received: 28 December 2016
Accepted: 26 July 2018
First Online: 11 August 2018