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Mathematical Evaluation of a-Si:H Film Formation in rf-PECVD Systems

Crossref DOI link: https://doi.org/10.1007/s12633-019-00167-9

Published Online: 2019-05-16

Published Print: 2020-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ganji, Jabbar

Kosarian, Abdolnabi https://orcid.org/0000-0002-4590-2564
Kaabi, Hooman
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Text and Data Mining valid from 2019-05-16

Version of Record valid from 2019-05-16
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Article History

Received: 17 August 2018

Accepted: 25 April 2019

First Online: 16 May 2019