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Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment

Crossref DOI link: https://doi.org/10.1007/s12633-019-00362-8

Published Online: 2020-01-02

Published Print: 2020-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Verma, Priyanshu

Punetha, Deepak https://orcid.org/0000-0002-5737-2900
Pandey, Saurabh Kumar
License Information

Text and Data Mining valid from 2020-01-02

Version of Record valid from 2020-01-02
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Article History

Received: 1 October 2019

Accepted: 15 December 2019

First Online: 2 January 2020