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Hydrogenated Silicon Carbonitride Thin Film Nanostructuring Using SF6 Plasma: Structural and Optical Analysis

Crossref DOI link: https://doi.org/10.1007/s12633-020-00392-7

Published Online: 2020-01-23

Published Print: 2020-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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