Improvement in Sensing Characteristics of Silicon Microstructure based MEMS Capacitive Sensor for Automotive Applications
Crossref DOI link: https://doi.org/10.1007/s12633-020-00540-z
Published Online: 2020-06-10
Published Print: 2021-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Suman, Shreya
Punetha, Deepak
Pandey, Saurabh Kumar
Text and Data Mining valid from 2020-06-10
Version of Record valid from 2020-06-10
Article History
Received: 14 January 2020
Accepted: 1 June 2020
First Online: 10 June 2020