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Formation of Nanometric Yttrium Silicides Layers onto Si (111) Substrate by Ion Implantation

Crossref DOI link: https://doi.org/10.1007/s12633-020-00759-w

Published Online: 2020-10-17

Published Print: 2021-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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