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Morphological, Mechanical Property Analysis and Comparative Study over Structural Properties of CVD TiN Film Grown under Different Substrate Temperature in Nitrogen Gas Atmosphere

Crossref DOI link: https://doi.org/10.1007/s12633-020-00807-5

Published Online: 2020-11-07

Published Print: 2022-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Das, Soham

Guha, Spandan https://orcid.org/0000-0002-5363-0482
Ghadai, Ranjan

Sharma, Ashis

Chatterjee, Saikat
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Text and Data Mining valid from 2020-11-07

Version of Record valid from 2020-11-07
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Article History

Received: 6 September 2020

Accepted: 26 October 2020

First Online: 7 November 2020

Compliance with Ethical Standards

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: The authors declare that they have no conflict of interest.

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