Nanoindentation Characterization of Single-Crystal Silicon with Oxide Film
Crossref DOI link: https://doi.org/10.1007/s12633-021-01297-9
Published Online: 2021-08-07
Published Print: 2022-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yin, Lianmin
Dai, Yifan
Hu, Hao
Funding for this research was provided by:
National Natural Science Foundation of China-Yunnan Joint Fund (51835013, 51991371)
Text and Data Mining valid from 2021-08-07
Version of Record valid from 2021-08-07
Article History
Received: 28 May 2021
Accepted: 25 July 2021
First Online: 7 August 2021