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RA-ECDM of Silicon Wafers Using Taguchi’s Methodology and Machine Learning Algorithms

Published Online: 2022-09-21

Published Print: 2023-02

Authors

Singh, Manpreet https://orcid.org/0000-0001-9284-4697
Antil, Parvesh

Singh, Sarbjit

Katal, Nitish

Bakshi, Dapinder Kaur

Alkesh,
Funding

Funding for this research was provided by:

Science and Engineering Research Board, DST, India (EMR/2016/005352)
License Information

Text and Data Mining valid from 2022-09-21

Version of Record valid from 2022-09-21
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Article History

Received: 27 May 2022

Accepted: 13 September 2022

First Online: 21 September 2022

Declarations

:

: Not Applicable

: Not Applicable

: Not Applicable

: The authors declare that they have no competing interests.

: The authors declare no conflicts of interest.

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