Investigation of MEMS Piezoresistive Pressure Sensor with a Freely Supported Rectangular Silicon Carbide Diaphragm as a Primary Sensing Element for Altitudinal Applications
Crossref DOI link: https://doi.org/10.1007/s12633-022-02146-z
Published Online: 2022-10-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kanekal, Dadasikandar
Jindal, Sumit Kumar
Text and Data Mining valid from 2022-10-06
Version of Record valid from 2022-10-06
Article History
Received: 25 August 2022
Accepted: 27 September 2022
First Online: 6 October 2022
Declarations
:
: Not Applicable.
: Yes.