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Formation of Globally Uniaxial Strain in He+ Implanted Silicon-on-Insulator Wafers Based on the Size Effect of Internal Stress of Strip SiN Films

Published Online: 2023-11-23

Published Print: 2024-02

Authors

Xu, Hao

Jing, Yibo

Miao, Dongming

Guo, Yiwei

Han, Jia

Wang, Lin

Song, Jianjun

Dai, Xianying
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Text and Data Mining valid from 2023-11-23

Version of Record valid from 2023-11-23
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Article History

Received: 11 September 2023

Accepted: 30 October 2023

First Online: 23 November 2023

Declarations

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: Not applicable.

: Yes. All permission granted.

: The authors agree to publish.

: The authors declare no competing interests.

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